Comments on Next Big Future: A simple-to-make "superlens" can focus 10 times be...

TomEvanescent wave lithographyhttp://www.physorg.c...

2008-04-25T22:00:00.000-07:00

Tom

Evanescent wave lithography
http://www.physorg.com/news10755.html

http://www.eetindia.co.in/ART_8800406817_1800007_NT_e11b9ebf.HTM

don't see the stepper discussed

A patent talking about trying to superlens for lithography

http://www.freepatentsonline.com/70159617.html

Some slides talking about lithography and trying to use wavefront engineering (which is what the superlens is doing)

http://inst.eecs.berkeley.edu/~ee290f/fa04/lithoslides.pdf

http://xlab.me.berkeley.edu/publications/pdfs/17.AppPhysL_12.22.2003_evwave-superlens.pdf

http://nanotechweb.org/cws/article/tech/25894Other...

2008-04-25T21:45:00.000-07:00

http://nanotechweb.org/cws/article/tech/25894

Other have already adapted superlens to microscopes.

Nanophotonics group at Germany’s Max Planck Institute for Biochemistry, working with physicists at the University of Texas, have obtained direct sub-wavelength images of objects by fitting a conventional SNOM (Scanning near-field optical microscopes) with a superlens.

i'm keen to see someone couple this with tradition...

2008-04-25T19:33:00.000-07:00

i'm keen to see someone couple this with traditional visible optics (ie: cameras).

i wonder if the technique can be used to get electron microscope performance with traditional old-school photonic microscopes.

The required vacuum of electron microscopes is troublesome.

While indeed promising, if the 1/10th wavelength s...

2008-04-24T12:40:00.000-07:00

While indeed promising, if the 1/10th wavelength spots can only be created separated by at least a wavelength, then to use this for lithography, one might need to step the lense into 100 (i.e. 10x10) or more different positions to fill in an area.

That would potentially increase the time spent on the imaging step by around 100x, which would substantially increase chip cost.