Here is a pdf that describes the technology of dip pen nanolithography. Nanoink is the main company with this technology. They have arrays of 55,000 dip pens and have plans for megadpn arrays with millions of dip pens.
They can deposit various kinds of material onto various substrates. Some deposits are in the 13-25 nanometer size. They are using arrays of scanning probe tips so as the scanning probe accuracy and repeatability is improved the arrays could become molecularly precise.