Flourine will speed silicon chips to 11Ghz and circuits to 110 Ghz

Another item pointed out by nanotech-now.com Researchers added fluorine implants to the silicon layers using a common manufacturing process, known as ion implantation. This enabled circuits to go to 110 Ghz. Chips are usually one tenth the speed of circuits so that would mean 11 Ghz chips

Ion implantation involves firing atoms of one element, in this case fluorine, at a target of silicon.